Modeling Support Loss in Torsional Mode Vibrations of a Micromechanical Disk Resonator with Two L-Shaped Support Beams
Abstract
In this paper, a new micromechanical disc resonator with two L-shaped horizontal support beams in torsional mode vibrations has been proposed. The proposed micromechanical resonator has been studied in the field of natural frequencies and support loss. In order to verify the findings of natural frequencies, the analytical results are compared to the simulation results given by ANSYS software. A good agreement between analytical and simulation results is shown. In addition a closed-form equation for support loss quality factor in torsional mode vibrations of the proposed micromechanical resonator is presented. The results show that using L-shaped support beams can improve the support loss quality factor up to two times.
Keywords:
quality factor, support loss, torsional mode, micromechanical disk resonatorDownloads
References
L. Lin, R. T. Howe, A. P. Pisano, “Microelectromechanical filters for signal processing”, Journal of Microelectromechanical Systems, Vol. 7, pp. 286-294, 1998 DOI: https://doi.org/10.1109/84.709645
A. Gualdino, V. Chu, J. P. Conde, “Multi-modal analysis of out-of-plane vibration modes of thin-film circular resonators for mass sensing applications”, Procedia Engineering, Vol. 47, pp. 1121-1124, 2012 DOI: https://doi.org/10.1016/j.proeng.2012.09.348
J. Li, J. Fang, H. Dong, Y. Tao, “Structural design and fabrication of a novel dual-mass resonant output micromechanical gyroscope”, Microsystem Technology, Vol. 16, pp. 543-552, 2010 DOI: https://doi.org/10.1007/s00542-009-0998-8
B. Chouvion, Vibration transmission and support loss in MEMS sensors, PhD Thesis, The University of Nottingham, 2010
Y. B. Yi, “Geometric effects on thermoelastic damping in MEMS resonators”, Journal of Sound and Vibration, Vol. 309, No. 3-5, pp. 588-599, 2008 DOI: https://doi.org/10.1016/j.jsv.2007.07.055
B. Kim, M. A. Hopcroft, R. A. Candler, C. A. Jha, M. Agarwal, R. Melamud, S. A. Chandorkar, G. Yama, T.W. Kenny, “Temperature Dependence of Quality Factor in MEMS Resonators”, Journal of Microelectromechanical Systems, Vol. 17, No. 3, pp. 755-766, 2008 DOI: https://doi.org/10.1109/JMEMS.2008.924253
S. A. Chandorkar, R. Agarwal, M. Melamud, R. N. Candler, K. E. Goodson, T. W. Kenny, “Limits of quality factor in bulk-mode micromechanical resonators”, The IEEE 21th International conference on Micro Electro Mechanical Systems, Tucson, USA, pp. 74-77, 2008 DOI: https://doi.org/10.1109/MEMSYS.2008.4443596
X. Wang, D. Xiao, Z. Zhou, Z. Chen, X. Wu, S. Li, “Support loss for beam undergoing coupled vibration of bending and torsion in rocking mass resonator”, Sensors and Actuators A, Vol. 171, pp. 199-206, 2011 DOI: https://doi.org/10.1016/j.sna.2011.08.023
Z. Hao, A. Erbil, F. Ayazi, “An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations”, Sensors and Actuators A, Vol. 109, pp. 156-164, 2003 DOI: https://doi.org/10.1016/j.sna.2003.09.037
Z. Hao, F. Ayazi, “Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators”, Sensors and Actuators A, Vol. 134, pp. 582-593, 2007 DOI: https://doi.org/10.1016/j.sna.2006.05.020
Z. Hao, “Thermoelastic damping in the contour-mode vibrations of micro- and nano-electromechanical circular thin-plate resonators”, Journal of Sound and Vibration, Vol. 313, pp. 77-96, 2008 DOI: https://doi.org/10.1016/j.jsv.2007.11.035
M. Bagheri, A. Bijari, M. Raghebi, “Modeling and calculating the anchor loss quality factor in the plunging-mode vibrations of a micromechanical rectangular-plate resonator with two T-shaped support beams”, Modares Mechanical Engineering, Vol. 14, No. 12, pp. 75-84, 2014, (in Persian)
B. Min-hang, Analysis and Design Principles of MEMS Devices, Elsevier B.V, pp. 60–62, 2005
H. Urey, C. Kan, W.O. Davis, “Vibration mode frequency formulae for micromechanical scanners”, Journal of Micro-Mechanics and Microengineering, Vol. 15, pp. 1713–1721, 2005 DOI: https://doi.org/10.1088/0960-1317/15/9/013
J. A. Judge, D. M. Photiadis, J. F. Vignola, B. H. Houston, J. Jarzynski, “Attachment loss of micromechanical and nanomechanical resonators in the limits of thick and thin support structures”, Journal of Applied Physics, Vol. 101, pp. 1-11, 2007 DOI: https://doi.org/10.1063/1.2401271
J. X. Su, A. T. Moorhouse, “Closed form solution for the mobility of an edge excited, semi-infinite plate”, Journal of Acoustical Society of America, Vol. 115, pp. 2075-2082, 2004 DOI: https://doi.org/10.1121/1.1698861
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