A Tunable Capacitor Based on MEMS Technology for RF Applications
A tunable capacitor based on MEMS technology is presented in this paper. The proposed structure consists of two fixed-fixed parallel movable plates with 4 supports. Movability of two plates makes it possible to actuate the plates with a small voltage. When the actuation is applied, two plates move together and their distance is decreased, hence the capacitance is increased and tuning is achieved. The structure is simulated through the finite element method using COMSOL and ANSOFT HFSS software. Simulation results show that the actuation voltage required to access the 59% tuning, is 7 V. The effective area of the designed tunable capacitor is 200 x 200 µm2 with a thickness of 2 µm. The quality factor is 91 at 11 GHz which is sufficient for various RF communication applications such as filters, transceivers and so on. The low stress induced on the plates and low actuation voltage, are the main advantages of the design.
H. L. Krauss, C. W. Bostian, F. H. Raab, Solid State Radio Engineering, New York, NY, USA: John Wiley & Sons, 1980.
G. M. Rebeiz, RF MEMS theory, design and Applications. New Jersey, USA: John Wiley & Sons, 2003. DOI: https://doi.org/10.1002/0471225282
J. J. Yao, “RF MEMS from a device perspective”, J. Micromech. Microeng., Vol. 10, pp. 9-38, 2000 DOI: https://doi.org/10.1088/0960-1317/10/4/201
H. J. De Los Santos, RF MEMS Circuit Design for Wireless Communications, Artech House, 2002 DOI: https://doi.org/10.1002/0471219282.eot370
D. J. Young, B. E. A. Boser, “Micromachined Variable Capacitor for Monolithic Low-Noise VCOs”, Solid-State Sensor and Actuator Workshop, Hilton Head, pp.86-89, USA, 1996
W. Wan, D. Lowther, “Design and synthesis of wide tuning range variable comb drive MEMS capacitors”, COMPEL, Vol. 26, pp. 689-699, 2006 DOI: https://doi.org/10.1108/03321640710751154
M. Dong, J. Xiang, P. H. Wang, Z. Young, X. L. Zhao, “Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor”, Microsyst. Technol., Vol. 14, pp. 397-402, 2008 DOI: https://doi.org/10.1007/s00542-007-0487-x
H. Mahmoodnia, B. A. Ganji, “A Novel High Tuning ratio MEMS Cantilever Variable Capacitor”, Microsyst. Technol., Vol. 19, pp. 1913-1918, 2013 DOI: https://doi.org/10.1007/s00542-013-1835-7
A. Dec, K. Suyama, “Micromachined electro-mechanically tunable capacitors and their applications to RF IC’s”, IEEE T. Microw. Theory, Vol. 46, pp. 2587–2595, 1998 DOI: https://doi.org/10.1109/22.739251
H. Nabovati, K. Mafinejad, H. Keshmiri, A. Nabovati, “Design and Simulation of an Oblique Suspender MEMS Variable Capacitor”, SCI IRAN, Vol. 13, pp. 60-66, 2006
J. Zou, C. Liu, J. Schutt-Aine, “Development of a wide tuning-range two-parallel-plate tunable capacitor for integrated wireless communication systems”, International Journal of RF and Microwave Computer-Aided Engineering, , Vol. 11, pp. 322–329, 2001 DOI: https://doi.org/10.1002/mmce.1040
L. Dussopt, G. M. Rebeiz, “High-Q millimeter-wave MEMS varactor: Extended tuning range and discrete-position designs”, IEEE MTT-S International Microwave Symposium Digest, Seattle, WA, IEEE. pp. 1205–1208, USA, 2002
A. Oz, CMOS/BiCMOS self-assembling and electrothermal microactuators for tunable capacitors, MSc, Carnegie Mellon University, Pittsburgh, USA, 2003
J. J. Yao, S. T. Park, J. DeNatale, “High tuning-ratio MEMS-based tunable capacitors for RF communication applications”, Solid-State and Actuator Workshop, Hilton Head, pp. 124–127, USA, 1998
J. J. Yao, S. T. Park, R. Anderson, J. DeNatale, “A low power/low voltage electrostatic actuator for RF MEMS applications”, Solid-State Sensors and Actuator Workshop, Hilton Head, pp. 246–249, USA, 2000
C. L. Goldsmith, A. Malczewski, Z. J. Yao, S. Chen, J. Ehmke, D. H. Hinzel, “RF MEMS variable capacitors for tunable filters”, International Journal of RF and Microwave Computer-Aided Engineering, Vol. 9, pp. 362–374, 1999 DOI: https://doi.org/10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H
J. Y. Park, Y. J. Yee, H. J. Nam, J. U. Bu, “Micromachined RF MEMS tunable capacitors using piezoelectric actuators”, EEE MTT-S International Microwave Symposium Digest, pp. 2111–2114, 2001
Z. Feng, H. Zhang, W. Zhang, B. Su, K. C. Gupta, V. M. Bright, Y. C. Lee, “MEMS based variable capacitor for millimeter-wave applications”, Solid-State Sensors and Actuators Workshop, pp. 255–258, 2000
S. Afrang, E. Abbaspour-Sani, “A Low Voltage Capacitive Micromachined Microwave Switch”, IEEE International Conference On Semiconductor Electronics, Kualalampur, pp. 110-114, Malaysia, 2002
E. Abbaspour-Sani, N. Nasirzadeh, G. Dadashzadeh, “Two Novel Structures for Tunable MEMS Capacitor with RF Applications”, Progress in Electromagnetic Research, Vol. 68, pp. 169–183, 2007 DOI: https://doi.org/10.2528/PIER06081404
L. Xiuhan, Y. Xia, L. Jian, L. Yin, Y. Liu, D. Fang, H. Zhang, “Tunable RF MEMS capacitor for wireless communication”, International Conference on Optical Instruments and Technology, China, October 19-22, 2009
Y. Kim, S. G. Lee, S. Park, “Design of the movable plate type MEMS voltage tunable capacitor”, International Conference on Modeling and Simulation of Microsystems, pp. 246-249, 2002
B. Kaseem, Masher, R. M. Raafar, “Two movable plate nitride loaded MEMS variable capacitor”, IEEE T Microw. Theory, Vol. 52, pp. 831-837, 2004 DOI: https://doi.org/10.1109/TMTT.2004.823598
Y. Kim, S. Park, “Design of the RF MEMS voltage tunable capacitor for wide tunable range”, International Symposium on Microelectronics and MEMS, Adelaide, Australia, 2001 DOI: https://doi.org/10.1117/12.448861
J. M. Gere, S. P. Timoshenko, Mechanics of Materials, PWS Publishing Company, 2003
S. Afrang, G. Rezazadeh, “Design and simulation of simple and varying section cantilever and fixed-fixed end types MEMS switches”, IEEE International Conference On Semiconductor Electronics, Kualalampur, pp. 593-596, Malaysia, 2004
M. M. Teymoori, Design and Simulation of a Novel Electrostatic Micromachined pump for Medical Applications, MSc, Urmia University, Iran, 2003
MetricsAbstract Views: 635
PDF Downloads: 533
Authors who publish with this journal agree to the following terms:
- Authors retain the copyright and grant the journal the right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.
- Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgement of its initial publication in this journal.
- Authors are permitted and encouraged to post their work online (e.g., in institutional repositories or on their website) after its publication in ETASR with an acknowledgement of its initial publication in this journal.